Gas laser oscillator and method of measuring laser gas replacement amount

Gas laser oscillator and method of measuring laser gas replacement amount

A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure measuring device for measuring a pressure in the gas chamber, and a control device functioning as a la...

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Hauptverfasser: SHIOMI TOSHIYASU, SUZUKI KAZUHIRO, EGAWA AKIRA, KUBO YOSHITAKA
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
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creator SHIOMI TOSHIYASU
SUZUKI KAZUHIRO
EGAWA AKIRA
KUBO YOSHITAKA
description A gas laser oscillator includes a supply-side valve for regulating a laser gas supply to a gas chamber, an exhaust-side valve for regulating a laser gas exhaust from the gas chamber, a gas pressure measuring device for measuring a pressure in the gas chamber, and a control device functioning as a laser gas replacement measuring device. The control device makes a first measurement and a second measurement of the pressure in the gas chamber by a gas pressure measuring device at a predetermined time interval during the vacuuming or purging of the gas chamber, and determines the laser gas replacement amount per unit time during the laser oscillating operation, based on the results of the first and second measurements.
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subjects BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRICITY
title Gas laser oscillator and method of measuring laser gas replacement amount
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