Devices, systems and methods for determining temperature and/or optical characteristics of a substrate

A system for measuring the true temperature of a substrate in a deposition system is disclosed. The temperature measurement system has at least one opening formed within a showerhead or manifold placed above a substrate of the deposition system. The temperature measurement system includes an optical...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: CHAMPETIER ROBERT J
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator CHAMPETIER ROBERT J
description A system for measuring the true temperature of a substrate in a deposition system is disclosed. The temperature measurement system has at least one opening formed within a showerhead or manifold placed above a substrate of the deposition system. The temperature measurement system includes an optical pyrometer and reflectometer external to the coating chamber that looks through a window or windows and through the at least one opening in the showerhead to sense the substrate being coated. Depending on the particular chamber and showerhead configuration, the system either makes a passive emissivity correction or has an integral reflectometer for an active emissivity correction. Optical features confer an insensitivity to small motions of the showerhead in large coaters where optical alignment is not assured due to thermal and mechanical influences.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2007076780A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2007076780A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2007076780A13</originalsourceid><addsrcrecordid>eNqNyr0KwjAUxfEuDqK-wwVXxajQuoofuKtzuaYnNtAmITcVfHsj-ABOB_7nNy7MES-rIQuStyT0Quwa6pFa3wgZH6lBQuyts-5JGQRETkPE163y7UOymjvSLUfWmVrJQcgbYpLhISl7TIuR4U4w--2kmJ9Pt8NlieBrSGANh1TfrxulKlWV1U7t19v_1AemLUEC</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Devices, systems and methods for determining temperature and/or optical characteristics of a substrate</title><source>esp@cenet</source><creator>CHAMPETIER ROBERT J</creator><creatorcontrib>CHAMPETIER ROBERT J</creatorcontrib><description>A system for measuring the true temperature of a substrate in a deposition system is disclosed. The temperature measurement system has at least one opening formed within a showerhead or manifold placed above a substrate of the deposition system. The temperature measurement system includes an optical pyrometer and reflectometer external to the coating chamber that looks through a window or windows and through the at least one opening in the showerhead to sense the substrate being coated. Depending on the particular chamber and showerhead configuration, the system either makes a passive emissivity correction or has an integral reflectometer for an active emissivity correction. Optical features confer an insensitivity to small motions of the showerhead in large coaters where optical alignment is not assured due to thermal and mechanical influences.</description><language>eng</language><subject>COLORIMETRY ; MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT ; MEASURING ; MEASURING QUANTITY OF HEAT ; MEASURING TEMPERATURE ; PHYSICS ; RADIATION PYROMETRY ; TESTING ; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR</subject><creationdate>2007</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20070405&amp;DB=EPODOC&amp;CC=US&amp;NR=2007076780A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20070405&amp;DB=EPODOC&amp;CC=US&amp;NR=2007076780A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>CHAMPETIER ROBERT J</creatorcontrib><title>Devices, systems and methods for determining temperature and/or optical characteristics of a substrate</title><description>A system for measuring the true temperature of a substrate in a deposition system is disclosed. The temperature measurement system has at least one opening formed within a showerhead or manifold placed above a substrate of the deposition system. The temperature measurement system includes an optical pyrometer and reflectometer external to the coating chamber that looks through a window or windows and through the at least one opening in the showerhead to sense the substrate being coated. Depending on the particular chamber and showerhead configuration, the system either makes a passive emissivity correction or has an integral reflectometer for an active emissivity correction. Optical features confer an insensitivity to small motions of the showerhead in large coaters where optical alignment is not assured due to thermal and mechanical influences.</description><subject>COLORIMETRY</subject><subject>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</subject><subject>MEASURING</subject><subject>MEASURING QUANTITY OF HEAT</subject><subject>MEASURING TEMPERATURE</subject><subject>PHYSICS</subject><subject>RADIATION PYROMETRY</subject><subject>TESTING</subject><subject>THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2007</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyr0KwjAUxfEuDqK-wwVXxajQuoofuKtzuaYnNtAmITcVfHsj-ABOB_7nNy7MES-rIQuStyT0Quwa6pFa3wgZH6lBQuyts-5JGQRETkPE163y7UOymjvSLUfWmVrJQcgbYpLhISl7TIuR4U4w--2kmJ9Pt8NlieBrSGANh1TfrxulKlWV1U7t19v_1AemLUEC</recordid><startdate>20070405</startdate><enddate>20070405</enddate><creator>CHAMPETIER ROBERT J</creator><scope>EVB</scope></search><sort><creationdate>20070405</creationdate><title>Devices, systems and methods for determining temperature and/or optical characteristics of a substrate</title><author>CHAMPETIER ROBERT J</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2007076780A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2007</creationdate><topic>COLORIMETRY</topic><topic>MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT</topic><topic>MEASURING</topic><topic>MEASURING QUANTITY OF HEAT</topic><topic>MEASURING TEMPERATURE</topic><topic>PHYSICS</topic><topic>RADIATION PYROMETRY</topic><topic>TESTING</topic><topic>THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR</topic><toplevel>online_resources</toplevel><creatorcontrib>CHAMPETIER ROBERT J</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>CHAMPETIER ROBERT J</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Devices, systems and methods for determining temperature and/or optical characteristics of a substrate</title><date>2007-04-05</date><risdate>2007</risdate><abstract>A system for measuring the true temperature of a substrate in a deposition system is disclosed. The temperature measurement system has at least one opening formed within a showerhead or manifold placed above a substrate of the deposition system. The temperature measurement system includes an optical pyrometer and reflectometer external to the coating chamber that looks through a window or windows and through the at least one opening in the showerhead to sense the substrate being coated. Depending on the particular chamber and showerhead configuration, the system either makes a passive emissivity correction or has an integral reflectometer for an active emissivity correction. Optical features confer an insensitivity to small motions of the showerhead in large coaters where optical alignment is not assured due to thermal and mechanical influences.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_US2007076780A1
source esp@cenet
subjects COLORIMETRY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
MEASURING QUANTITY OF HEAT
MEASURING TEMPERATURE
PHYSICS
RADIATION PYROMETRY
TESTING
THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
title Devices, systems and methods for determining temperature and/or optical characteristics of a substrate
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-24T01%3A10%3A56IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=CHAMPETIER%20ROBERT%20J&rft.date=2007-04-05&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2007076780A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true