Microelectromechanical switches having mechanically active components which are electrically isolated from components of the switch used for the transmission of signals

A plate-based microelectromechanical system (MEMS) switch is provided which includes a moveable plate suspended above a substrate and a plurality of arms extending from the periphery of the moveable plate. The moveable plate includes a first electrode suspended over a second electrode arranged on th...

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Bibliographische Detailangaben

Hauptverfasser:	YEE IAN Y.K, FLYNN WILLIAM G
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES RELAYS SELECTORS
Online-Zugang:	Volltext bestellen
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