Piezoelectric micromachined ultrasonic transducer with air-backed cavities

A piezoelectric micromachined ultrasonic transducer comprising a substrate and a first dielectric film formed on the substrate. An opening having a sidewall is formed through the substrate and first dielectric film. A bottom electrode is formed on the first dielectric film spanning the opening. A pi...

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Bibliographische Detailangaben

1. Verfasser:	DAUSCH DAVID E
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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