APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME

An apparatus for manufacturing a semiconductor includes a polyhedral transfer chamber, a first process module for forming a gate dielectric layer by ALD, and a second process module for thermally treating the gate dielectric layer. The first process module is in communication with a first side of th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YOU YOUNG-SUB, KIM JAE-WOONG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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