Acceleration sensor

An acceleration sensor in accordance with an aspect of the present invention comprises a first substrate, a multilayer second substrate and a sensor portion. The multilayer second substrate is opposed to the first substrate. The multilayer second substrate is provided with an electrode drawing openi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHIBATA SEISHI, KATAHARA YUTAKA, FUKAURA TERUYA, KATSUKI SHINICHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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