Method and apparatus for detecting defects

There is disclosed a defect detecting apparatus that focuses a laser beam, irradiates it onto the surface of a sample to be examined, and detects a foreign substance/defect existing on the surface from the scattered light as a result of the irradiation of the beam onto the sample surface. In order t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	IWATA HISAFUMI, OHSHIMA YOSHIMASA, NAKANO HIROYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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