Erosion resistant textured chamber surface

Erosion resistant textured chamber surface

A component for a substrate processing chamber has a structure having an overlying metal coating. The metal coating has a plurality of electron beam textured features that are formed by scanning an electron beam across a surface of the metal coating. The electron beam textured features include a plu...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SCHWEITZER MARC O, TILLER JENNIFER W, WEST BRIAN T, POPIOLKOWSKI ALAN, BRUECKNER KARL
Format: Patent
Sprache:eng
Schlagworte:
LAYERED PRODUCTS
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
PERFORMING OPERATIONS
TRANSPORTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator SCHWEITZER MARC O
TILLER JENNIFER W
WEST BRIAN T
POPIOLKOWSKI ALAN
BRUECKNER KARL
description A component for a substrate processing chamber has a structure having an overlying metal coating. The metal coating has a plurality of electron beam textured features that are formed by scanning an electron beam across a surface of the metal coating. The electron beam textured features include a plurality of depressions and protuberances on the surface that are capable of accumulating process deposits during processing of a substrate to reduce contamination of the substrate. The component having the metal coating provides improved processing results, and exhibits reduced erosion during cleaning processes performed to remove process deposits from the component.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2006105182A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2006105182A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2006105182A13</originalsourceid><addsrcrecordid>eNrjZNByLcovzszPUyhKLc4sLknMK1EoSa0oKS1KTVFIzkjMTUotUiguLUpLTE7lYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQVAJXmpJfGhwUYGBmaGBqaGFkaOhsbEqQIAC_IqYw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Erosion resistant textured chamber surface</title><source>esp@cenet</source><creator>SCHWEITZER MARC O ; TILLER JENNIFER W ; WEST BRIAN T ; POPIOLKOWSKI ALAN ; BRUECKNER KARL</creator><creatorcontrib>SCHWEITZER MARC O ; TILLER JENNIFER W ; WEST BRIAN T ; POPIOLKOWSKI ALAN ; BRUECKNER KARL</creatorcontrib><description>A component for a substrate processing chamber has a structure having an overlying metal coating. The metal coating has a plurality of electron beam textured features that are formed by scanning an electron beam across a surface of the metal coating. The electron beam textured features include a plurality of depressions and protuberances on the surface that are capable of accumulating process deposits during processing of a substrate to reduce contamination of the substrate. The component having the metal coating provides improved processing results, and exhibits reduced erosion during cleaning processes performed to remove process deposits from the component.</description><language>eng</language><subject>LAYERED PRODUCTS ; LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM ; PERFORMING OPERATIONS ; TRANSPORTING</subject><creationdate>2006</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20060518&amp;DB=EPODOC&amp;CC=US&amp;NR=2006105182A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20060518&amp;DB=EPODOC&amp;CC=US&amp;NR=2006105182A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SCHWEITZER MARC O</creatorcontrib><creatorcontrib>TILLER JENNIFER W</creatorcontrib><creatorcontrib>WEST BRIAN T</creatorcontrib><creatorcontrib>POPIOLKOWSKI ALAN</creatorcontrib><creatorcontrib>BRUECKNER KARL</creatorcontrib><title>Erosion resistant textured chamber surface</title><description>A component for a substrate processing chamber has a structure having an overlying metal coating. The metal coating has a plurality of electron beam textured features that are formed by scanning an electron beam across a surface of the metal coating. The electron beam textured features include a plurality of depressions and protuberances on the surface that are capable of accumulating process deposits during processing of a substrate to reduce contamination of the substrate. The component having the metal coating provides improved processing results, and exhibits reduced erosion during cleaning processes performed to remove process deposits from the component.</description><subject>LAYERED PRODUCTS</subject><subject>LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM</subject><subject>PERFORMING OPERATIONS</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2006</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNByLcovzszPUyhKLc4sLknMK1EoSa0oKS1KTVFIzkjMTUotUiguLUpLTE7lYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQVAJXmpJfGhwUYGBmaGBqaGFkaOhsbEqQIAC_IqYw</recordid><startdate>20060518</startdate><enddate>20060518</enddate><creator>SCHWEITZER MARC O</creator><creator>TILLER JENNIFER W</creator><creator>WEST BRIAN T</creator><creator>POPIOLKOWSKI ALAN</creator><creator>BRUECKNER KARL</creator><scope>EVB</scope></search><sort><creationdate>20060518</creationdate><title>Erosion resistant textured chamber surface</title><author>SCHWEITZER MARC O ; TILLER JENNIFER W ; WEST BRIAN T ; POPIOLKOWSKI ALAN ; BRUECKNER KARL</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2006105182A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2006</creationdate><topic>LAYERED PRODUCTS</topic><topic>LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM</topic><topic>PERFORMING OPERATIONS</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>SCHWEITZER MARC O</creatorcontrib><creatorcontrib>TILLER JENNIFER W</creatorcontrib><creatorcontrib>WEST BRIAN T</creatorcontrib><creatorcontrib>POPIOLKOWSKI ALAN</creatorcontrib><creatorcontrib>BRUECKNER KARL</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SCHWEITZER MARC O</au><au>TILLER JENNIFER W</au><au>WEST BRIAN T</au><au>POPIOLKOWSKI ALAN</au><au>BRUECKNER KARL</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Erosion resistant textured chamber surface</title><date>2006-05-18</date><risdate>2006</risdate><abstract>A component for a substrate processing chamber has a structure having an overlying metal coating. The metal coating has a plurality of electron beam textured features that are formed by scanning an electron beam across a surface of the metal coating. The electron beam textured features include a plurality of depressions and protuberances on the surface that are capable of accumulating process deposits during processing of a substrate to reduce contamination of the substrate. The component having the metal coating provides improved processing results, and exhibits reduced erosion during cleaning processes performed to remove process deposits from the component.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_US2006105182A1
source esp@cenet
subjects LAYERED PRODUCTS
LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
PERFORMING OPERATIONS
TRANSPORTING
title Erosion resistant textured chamber surface
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-28T23%3A12%3A23IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=SCHWEITZER%20MARC%20O&rft.date=2006-05-18&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2006105182A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true