Methods and apparatus for determining organic component concentrations in an electrolytic solution

The present invention relates to a method and apparatus for determining organic additive concentrations in a sample electrolytic solution, preferably a copper electroplating solution, by measuring the double layer capacitance of a measuring electrode in such sample solution. Specifically, the presen...

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Bibliographische Detailangaben
Hauptverfasser: HAN JIANWEN, KING MACKENZIE E
Format: Patent
Sprache:eng
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