Methods and apparatus for determining organic component concentrations in an electrolytic solution
The present invention relates to a method and apparatus for determining organic additive concentrations in a sample electrolytic solution, preferably a copper electroplating solution, by measuring the double layer capacitance of a measuring electrode in such sample solution. Specifically, the presen...
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creator | HAN JIANWEN KING MACKENZIE E |
description | The present invention relates to a method and apparatus for determining organic additive concentrations in a sample electrolytic solution, preferably a copper electroplating solution, by measuring the double layer capacitance of a measuring electrode in such sample solution. Specifically, the present invention utilizes the correlation between double layer capacitance and the organic additive concentration for concentration mapping, based on the double layer capacitance measured for the sample electrolytic solution. |
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fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2006102475A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2006102475A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2006102475A13</originalsourceid><addsrcrecordid>eNqNjLsKAjEQRdNYiPoPA9ZCdn3VIoqNlVovY3Z2DWRnQjJb-PdG8AOszoV7OFPzvJK-pM2A3ALGiAl1zNBJgpaU0uDZcw-SemTvwMkQhYm1LHaFRffCGTyXAlAgp0nCW4ubJYzfc24mHYZMix9nZnk-3Y-XFUVpKEcsHdLmcaut3VW23uy3h2r9n_UB15VAHg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Methods and apparatus for determining organic component concentrations in an electrolytic solution</title><source>esp@cenet</source><creator>HAN JIANWEN ; KING MACKENZIE E</creator><creatorcontrib>HAN JIANWEN ; KING MACKENZIE E</creatorcontrib><description>The present invention relates to a method and apparatus for determining organic additive concentrations in a sample electrolytic solution, preferably a copper electroplating solution, by measuring the double layer capacitance of a measuring electrode in such sample solution. Specifically, the present invention utilizes the correlation between double layer capacitance and the organic additive concentration for concentration mapping, based on the double layer capacitance measured for the sample electrolytic solution.</description><language>eng</language><subject>APPARATUS THEREFOR ; CHEMISTRY ; ELECTROFORMING ; ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES ; MEASURING ; METALLURGY ; PHYSICS ; PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS ; TESTING</subject><creationdate>2006</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20060518&DB=EPODOC&CC=US&NR=2006102475A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20060518&DB=EPODOC&CC=US&NR=2006102475A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HAN JIANWEN</creatorcontrib><creatorcontrib>KING MACKENZIE E</creatorcontrib><title>Methods and apparatus for determining organic component concentrations in an electrolytic solution</title><description>The present invention relates to a method and apparatus for determining organic additive concentrations in a sample electrolytic solution, preferably a copper electroplating solution, by measuring the double layer capacitance of a measuring electrode in such sample solution. Specifically, the present invention utilizes the correlation between double layer capacitance and the organic additive concentration for concentration mapping, based on the double layer capacitance measured for the sample electrolytic solution.</description><subject>APPARATUS THEREFOR</subject><subject>CHEMISTRY</subject><subject>ELECTROFORMING</subject><subject>ELECTROLYTIC OR ELECTROPHORETIC PROCESSES</subject><subject>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</subject><subject>MEASURING</subject><subject>METALLURGY</subject><subject>PHYSICS</subject><subject>PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2006</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjLsKAjEQRdNYiPoPA9ZCdn3VIoqNlVovY3Z2DWRnQjJb-PdG8AOszoV7OFPzvJK-pM2A3ALGiAl1zNBJgpaU0uDZcw-SemTvwMkQhYm1LHaFRffCGTyXAlAgp0nCW4ubJYzfc24mHYZMix9nZnk-3Y-XFUVpKEcsHdLmcaut3VW23uy3h2r9n_UB15VAHg</recordid><startdate>20060518</startdate><enddate>20060518</enddate><creator>HAN JIANWEN</creator><creator>KING MACKENZIE E</creator><scope>EVB</scope></search><sort><creationdate>20060518</creationdate><title>Methods and apparatus for determining organic component concentrations in an electrolytic solution</title><author>HAN JIANWEN ; KING MACKENZIE E</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2006102475A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2006</creationdate><topic>APPARATUS THEREFOR</topic><topic>CHEMISTRY</topic><topic>ELECTROFORMING</topic><topic>ELECTROLYTIC OR ELECTROPHORETIC PROCESSES</topic><topic>INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES</topic><topic>MEASURING</topic><topic>METALLURGY</topic><topic>PHYSICS</topic><topic>PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>HAN JIANWEN</creatorcontrib><creatorcontrib>KING MACKENZIE E</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HAN JIANWEN</au><au>KING MACKENZIE E</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Methods and apparatus for determining organic component concentrations in an electrolytic solution</title><date>2006-05-18</date><risdate>2006</risdate><abstract>The present invention relates to a method and apparatus for determining organic additive concentrations in a sample electrolytic solution, preferably a copper electroplating solution, by measuring the double layer capacitance of a measuring electrode in such sample solution. Specifically, the present invention utilizes the correlation between double layer capacitance and the organic additive concentration for concentration mapping, based on the double layer capacitance measured for the sample electrolytic solution.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | APPARATUS THEREFOR CHEMISTRY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY PHYSICS PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS TESTING |
title | Methods and apparatus for determining organic component concentrations in an electrolytic solution |
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