POLISHING PAD CONDITIONER WITH SHAPED ABRASIVE PATTERNS AND CHANNELS

A polishing pad conditioner comprises a base and a pad conditioning face on the base. The conditioning face comprises central and peripheral regions. Abrasive spokes having a substantially constant width of abrasive particles, extend from the central to the peripheral region. The spokes are symmetri...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BALAGANI VENKATA R, NGAN KENNY K, LAZARI GEORGE
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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