Scroll pump with controlled axial thermal expansion

Vacuum pumping apparatus includes a pump frame, a stationary scroll element secured to the pump frame, the stationary scroll element including a stationary scroll blade, an orbiting scroll element including an orbiting scroll blade intermeshed with the stationary scroll blade, a motor secured to the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CURRY ROBERT M.JR, LIEPERT ANTHONY G, WARREN JEFFREY C
Format: Patent
Sprache:eng
Schlagworte:
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