MRAM cell with flat topography and controlled bit line to free layer distance and method of manufacture

A method for forming MRAM cell structures wherein the topography of the cell is substantially flat and the distance between a bit line and a magnetic free layer, a word line and a magnetic free layer or a word line and a bit line and a magnetic free layer is precise and well controlled. The method i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HONG LIUBO, HAN CHERNGYI
Format: Patent
Sprache:eng
Schlagworte:
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