Substrate gripping apparatus, substrate gripping method and substrate releasing method

A robot hand 23 having a hand body 30 having a reference axis J 1 is provided with fixed holding members 40 and 41 and a movable holding member 42. The holding members 40, 41 and 42 are arranged on the hand body at angular intervals about the reference axis J 1 . Each of the fixed holding members 40...

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Bibliographische Detailangaben
Hauptverfasser:	YOSHIDA TETSUYA, UKITA AKIRA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES COMBINED OPERATIONS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HAND TOOLS HANDLING THIN OR FILAMENTARY MATERIAL MACHINE TOOLS MANIPULATORS METAL-WORKING NOT OTHERWISE PROVIDED FOR OTHER WORKING OF METAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING UNIVERSAL MACHINE TOOLS
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