Electroplating cell with hydrodynamics facilitating more uniform deposition across a workpiece during plating

A method and apparatus for establishing more uniform deposition across one or more faces of a workpiece in an electroplating process. The apparatus employs eductors in conjunction with a flow dampener member and other measures to provide a more uniform current distribution and a more uniform metal d...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SUN JENNY J, MILLER PHILLIP O, GEBHART LAWRENCE E, TAYLOR E. J
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator SUN JENNY J
MILLER PHILLIP O
GEBHART LAWRENCE E
TAYLOR E. J
description A method and apparatus for establishing more uniform deposition across one or more faces of a workpiece in an electroplating process. The apparatus employs eductors in conjunction with a flow dampener member and other measures to provide a more uniform current distribution and a more uniform metal deposit distribution as reflected in a coefficient of variability that is lower than conventional processes.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2005205429A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2005205429A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2005205429A13</originalsourceid><addsrcrecordid>eNqNjLEKwjAQQLs4iPoPB85CrTo4ilTc1bkcydUeJrlwSSn9exX7AU5vee_NC187MlklOswcnmDIORg4d9CNVsWOAT2bBC0adpx_khcl6AO3oh4sRUmcWQKgUUkJEAbRV2QyBLbXbzHtl8WsRZdoNXFRrC_1_XzdfB4NpYiGAuXmcavK8lCVh311PG13_1lvQAhEZg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Electroplating cell with hydrodynamics facilitating more uniform deposition across a workpiece during plating</title><source>esp@cenet</source><creator>SUN JENNY J ; MILLER PHILLIP O ; GEBHART LAWRENCE E ; TAYLOR E. J</creator><creatorcontrib>SUN JENNY J ; MILLER PHILLIP O ; GEBHART LAWRENCE E ; TAYLOR E. J</creatorcontrib><description>A method and apparatus for establishing more uniform deposition across one or more faces of a workpiece in an electroplating process. The apparatus employs eductors in conjunction with a flow dampener member and other measures to provide a more uniform current distribution and a more uniform metal deposit distribution as reflected in a coefficient of variability that is lower than conventional processes.</description><edition>7</edition><language>eng</language><subject>APPARATUS THEREFOR ; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ; CHEMISTRY ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ELECTROFORMING ; ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS ; METALLURGY ; PRINTED CIRCUITS ; PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS</subject><creationdate>2005</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20050922&amp;DB=EPODOC&amp;CC=US&amp;NR=2005205429A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20050922&amp;DB=EPODOC&amp;CC=US&amp;NR=2005205429A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SUN JENNY J</creatorcontrib><creatorcontrib>MILLER PHILLIP O</creatorcontrib><creatorcontrib>GEBHART LAWRENCE E</creatorcontrib><creatorcontrib>TAYLOR E. J</creatorcontrib><title>Electroplating cell with hydrodynamics facilitating more uniform deposition across a workpiece during plating</title><description>A method and apparatus for establishing more uniform deposition across one or more faces of a workpiece in an electroplating process. The apparatus employs eductors in conjunction with a flow dampener member and other measures to provide a more uniform current distribution and a more uniform metal deposit distribution as reflected in a coefficient of variability that is lower than conventional processes.</description><subject>APPARATUS THEREFOR</subject><subject>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</subject><subject>CHEMISTRY</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>ELECTROFORMING</subject><subject>ELECTROLYTIC OR ELECTROPHORETIC PROCESSES</subject><subject>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</subject><subject>METALLURGY</subject><subject>PRINTED CIRCUITS</subject><subject>PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2005</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNjLEKwjAQQLs4iPoPB85CrTo4ilTc1bkcydUeJrlwSSn9exX7AU5vee_NC187MlklOswcnmDIORg4d9CNVsWOAT2bBC0adpx_khcl6AO3oh4sRUmcWQKgUUkJEAbRV2QyBLbXbzHtl8WsRZdoNXFRrC_1_XzdfB4NpYiGAuXmcavK8lCVh311PG13_1lvQAhEZg</recordid><startdate>20050922</startdate><enddate>20050922</enddate><creator>SUN JENNY J</creator><creator>MILLER PHILLIP O</creator><creator>GEBHART LAWRENCE E</creator><creator>TAYLOR E. J</creator><scope>EVB</scope></search><sort><creationdate>20050922</creationdate><title>Electroplating cell with hydrodynamics facilitating more uniform deposition across a workpiece during plating</title><author>SUN JENNY J ; MILLER PHILLIP O ; GEBHART LAWRENCE E ; TAYLOR E. J</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2005205429A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2005</creationdate><topic>APPARATUS THEREFOR</topic><topic>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</topic><topic>CHEMISTRY</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>ELECTROFORMING</topic><topic>ELECTROLYTIC OR ELECTROPHORETIC PROCESSES</topic><topic>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</topic><topic>METALLURGY</topic><topic>PRINTED CIRCUITS</topic><topic>PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS</topic><toplevel>online_resources</toplevel><creatorcontrib>SUN JENNY J</creatorcontrib><creatorcontrib>MILLER PHILLIP O</creatorcontrib><creatorcontrib>GEBHART LAWRENCE E</creatorcontrib><creatorcontrib>TAYLOR E. J</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SUN JENNY J</au><au>MILLER PHILLIP O</au><au>GEBHART LAWRENCE E</au><au>TAYLOR E. J</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Electroplating cell with hydrodynamics facilitating more uniform deposition across a workpiece during plating</title><date>2005-09-22</date><risdate>2005</risdate><abstract>A method and apparatus for establishing more uniform deposition across one or more faces of a workpiece in an electroplating process. The apparatus employs eductors in conjunction with a flow dampener member and other measures to provide a more uniform current distribution and a more uniform metal deposit distribution as reflected in a coefficient of variability that is lower than conventional processes.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_US2005205429A1
source esp@cenet
subjects APPARATUS THEREFOR
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
CHEMISTRY
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
ELECTROFORMING
ELECTROLYTIC OR ELECTROPHORETIC PROCESSES
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
METALLURGY
PRINTED CIRCUITS
PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS
title Electroplating cell with hydrodynamics facilitating more uniform deposition across a workpiece during plating
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-28T09%3A47%3A42IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=SUN%20JENNY%20J&rft.date=2005-09-22&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS2005205429A1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true