Pressure sensor and method for fabricating the same

A pressure sensor comprising a plurality of sensor parts arranged in matrix. A first electrode being connected with first wiring and a second electrode being connected with second wiring are disposed oppositely through a cavity part in the sensor part. The second electrode bends to the first electro...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HIURA SAYAKA, INAMURA HIROSHI, MORIFUJI TOGO, YOSHIDA KOJI, TAKETA KAORU, ENDO MASAKI, YAMAUCHI TAKAO, NAGAMI KIMIHIKO, YAMAURA SYUNSUKE, KOBAYASHI CHIAKI, SUMI DAISUKE
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING HANDLING RECORD CARRIERS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS TESTING TRANSPORTING
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