Layered composite and micromechanical sensor element, in particular gas sensor element having said layered composite

A layered composite with a gas-sensitive layer (15) and a catalytically active layer (16), joined materially to it at least in some regions, is provided, in which the gas-sensitive layer (15) has a first material and the catalytically active layer (16) has both the first material and a catalytically...

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description A layered composite with a gas-sensitive layer (15) and a catalytically active layer (16), joined materially to it at least in some regions, is provided, in which the gas-sensitive layer (15) has a first material and the catalytically active layer (16) has both the first material and a catalytically active additive. It is also provided that the specific electrical resistance of the catalytically active layer (16) is higher than that of the gas-sensitive layer (15). In addition, a micromechanical sensor element (5), in particular a gas sensor element, with a dielectric layer (11), a gas-sensitive layer (15) disposed on the dielectric layer, and means (14) for detecting a change in the electrical conductivity of the gas-sensitive layer (15) under the influence of a gas is proposed. It is provided that the surface of the gas-sensitive layer (15) not occupied by the dielectric layer (11) is covered by a catalytically active layer (16), and that the gas-sensitive layer (15) and the catalytically active layer (16) form the proposed layered composite.
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subjects GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
TESTING
title Layered composite and micromechanical sensor element, in particular gas sensor element having said layered composite
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