Wafer support system

A wafer support system comprising a segmented susceptor having top and bottom sections and gas flow passages therethrough. A plurality of spacers projecting from a recess formed in the top section of the susceptor support a wafer in spaced relationship with respect to the recess. A sweep gas is intr...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: JEUGD CORNELIUS A. VAN DER, JACOBS LOREN R, GLENN HARTMANN, GOODMAN MATTHEW, VYNE ROBERT M, WENGERT JOHN F, FOSTER DERRICK W, LAYTON JASON M, HALPIN MICHAEL W, HAWKINS MARK R, VAN BILSEN FRANK B. M
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!