Method and device for vibration control

Method and device for vibration control

A vibration control system which comprises an actuator assembly, serves to replace the friction block entirely while improving settling time, or, alternatively, to operate in conjunction with the friction block, providing additional accuracy or speed of operation. In a preferred embodiment of the in...

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Hauptverfasser: PERKINS RICHARD, KARPEL MORDECHAY, LUBLIN LEONARD, DORN HUCKLEBERRY B, PLETNER BARUCH
Format: Patent
Sprache:eng
Schlagworte:
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
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creator PERKINS RICHARD
KARPEL MORDECHAY
LUBLIN LEONARD
DORN HUCKLEBERRY B
PLETNER BARUCH
description A vibration control system which comprises an actuator assembly, serves to replace the friction block entirely while improving settling time, or, alternatively, to operate in conjunction with the friction block, providing additional accuracy or speed of operation. In a preferred embodiment of the invention special dynamic modeling techniques are utilized to investigate structural movements and to provide precise motion control. In another preferred embodiment induced strain actuators are applied to elastic portions of a lithography reticle stage in order to reduce broadband vibration disturbances. Vertical positioning of the stage is accomplished using a PID controller and elastic vibration damping is implemented using a linear quadratic Gausian controller.
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subjects CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GENERATION
title Method and device for vibration control
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