Device for the detection of substrates stacked with a specific spacing

For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the mea...

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Hauptverfasser:	SCHULTZ KLAUS, BARRISS LOUISE S, KONIG JOACHIM, GILCHRIST ULYSSES, LAHNE BERNDT, HEINZE MANFRED, RAUE HAGEN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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creator	SCHULTZ KLAUS BARRISS LOUISE S KONIG JOACHIM GILCHRIST ULYSSES LAHNE BERNDT HEINZE MANFRED RAUE HAGEN
description	For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation. A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4). The device finds application, in particular, in the semiconductor industry for recording the state of occupancy of cassettes or containers with substrates, such as semiconductor wafers, flat-screen displays, or masks.
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fullrecord	<record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US2004188641A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US2004188641A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US2004188641A13</originalsourceid><addsrcrecordid>eNqNyjEKwkAQRuFtLES9w4C1kNUgaUUN9mod1sm_ZlB2Q2bU66vgAazeK76xq3d4CoNiHsg6UAsDm-REOZI-LmpDMCipBb6hpZdYR4G0B0sU_kxgSdepG8VwV8x-nbh5vT9tDwv0ucEXIcGa83FZFKWvqnXpN371n3oD2f00SA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Device for the detection of substrates stacked with a specific spacing</title><source>esp@cenet</source><creator>SCHULTZ KLAUS ; BARRISS LOUISE S ; KONIG JOACHIM ; GILCHRIST ULYSSES ; LAHNE BERNDT ; HEINZE MANFRED ; RAUE HAGEN</creator><creatorcontrib>SCHULTZ KLAUS ; BARRISS LOUISE S ; KONIG JOACHIM ; GILCHRIST ULYSSES ; LAHNE BERNDT ; HEINZE MANFRED ; RAUE HAGEN</creatorcontrib><description>For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation. A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4). The device finds application, in particular, in the semiconductor industry for recording the state of occupancy of cassettes or containers with substrates, such as semiconductor wafers, flat-screen displays, or masks.</description><edition>7</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2004</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20040930&DB=EPODOC&CC=US&NR=2004188641A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20040930&DB=EPODOC&CC=US&NR=2004188641A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SCHULTZ KLAUS</creatorcontrib><creatorcontrib>BARRISS LOUISE S</creatorcontrib><creatorcontrib>KONIG JOACHIM</creatorcontrib><creatorcontrib>GILCHRIST ULYSSES</creatorcontrib><creatorcontrib>LAHNE BERNDT</creatorcontrib><creatorcontrib>HEINZE MANFRED</creatorcontrib><creatorcontrib>RAUE HAGEN</creatorcontrib><title>Device for the detection of substrates stacked with a specific spacing</title><description>For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation. A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4). The device finds application, in particular, in the semiconductor industry for recording the state of occupancy of cassettes or containers with substrates, such as semiconductor wafers, flat-screen displays, or masks.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2004</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyjEKwkAQRuFtLES9w4C1kNUgaUUN9mod1sm_ZlB2Q2bU66vgAazeK76xq3d4CoNiHsg6UAsDm-REOZI-LmpDMCipBb6hpZdYR4G0B0sU_kxgSdepG8VwV8x-nbh5vT9tDwv0ucEXIcGa83FZFKWvqnXpN371n3oD2f00SA</recordid><startdate>20040930</startdate><enddate>20040930</enddate><creator>SCHULTZ KLAUS</creator><creator>BARRISS LOUISE S</creator><creator>KONIG JOACHIM</creator><creator>GILCHRIST ULYSSES</creator><creator>LAHNE BERNDT</creator><creator>HEINZE MANFRED</creator><creator>RAUE HAGEN</creator><scope>EVB</scope></search><sort><creationdate>20040930</creationdate><title>Device for the detection of substrates stacked with a specific spacing</title><author>SCHULTZ KLAUS ; BARRISS LOUISE S ; KONIG JOACHIM ; GILCHRIST ULYSSES ; LAHNE BERNDT ; HEINZE MANFRED ; RAUE HAGEN</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US2004188641A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2004</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>SCHULTZ KLAUS</creatorcontrib><creatorcontrib>BARRISS LOUISE S</creatorcontrib><creatorcontrib>KONIG JOACHIM</creatorcontrib><creatorcontrib>GILCHRIST ULYSSES</creatorcontrib><creatorcontrib>LAHNE BERNDT</creatorcontrib><creatorcontrib>HEINZE MANFRED</creatorcontrib><creatorcontrib>RAUE HAGEN</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SCHULTZ KLAUS</au><au>BARRISS LOUISE S</au><au>KONIG JOACHIM</au><au>GILCHRIST ULYSSES</au><au>LAHNE BERNDT</au><au>HEINZE MANFRED</au><au>RAUE HAGEN</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Device for the detection of substrates stacked with a specific spacing</title><date>2004-09-30</date><risdate>2004</risdate><abstract>For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation. A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4). The device finds application, in particular, in the semiconductor industry for recording the state of occupancy of cassettes or containers with substrates, such as semiconductor wafers, flat-screen displays, or masks.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record>
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subjects	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
title	Device for the detection of substrates stacked with a specific spacing
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