Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus using deflector

A deflector which makes multilayered wiring possible and prevents contamination during the manufacture includes an electrode substrate (400) having a plurality of through holes, and an electrode pair made up of first and second electrodes which oppose the side walls of each through hole in order to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAGAE KEN-ICHI, TERASAKI ATSUNORI, AKAIKE MASATAKE, TAMAMORI KENJI, HIROSE FUTOSHI, KOYAMA YASUSHI, ONO HARUHITO, NAKAYAMA YOSHINORI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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