Interferometric measuring method and device

An interferometric measuring method and device for measuring the shape of, or the distance to, surfaces are provided, in which light is generated, modulated with respect to its frequency, conducted to both an object surface and a reference surface, brought to interference, and conducted to a photode...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	STREIBL NORBERT, DRABAREK PAWEL
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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