Lapping plate topography system

A lapping plate topography system includes a measuring apparatus for measuring the surface of a lapping plate, and an analysis apparatus for analyzing and presenting the data resulting from such measurements. The measurement apparatus has a non-contacting capacitive probe for measuring a height of t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HAGEN JOHN PATRICK, MOOREFIELD GEORGE MCDONALD, BANITT TERRY FREDRICK, WELLER THOMAS DONALD, JOHNSON ROGER WILLARD, SERMON CARL FRANCIS
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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