Detection and making of ultralow lead contaminated UV optical fluoride crystals for < 200nm lithography

The invention provides a method of detecting sub-ppm lead impurity levels in a below 200 nm transmitting optical calcium fluoride crystal. The method includes providing a below 200 nm wavelength transmitting optical calcium fluoride crystal providing a fluorescence spectrometer having a light source...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MAYOLET ALEXANDRE M, TIMOFEEV NIKOLAY T
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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