Cathodic arc disposable sting shielding

A shielding arrangement is described for a cathodic arc deposition apparatus which includes a contactor formed from an electrically conductive material and having an axially extending shaft and a cathode. The shielding arrangement includes a cup formed from an electrically conductive material surrou...

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1. Verfasser: MARSZAL DEAN N
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creator MARSZAL DEAN N
description A shielding arrangement is described for a cathodic arc deposition apparatus which includes a contactor formed from an electrically conductive material and having an axially extending shaft and a cathode. The shielding arrangement includes a cup formed from an electrically conductive material surrounding a portion of the contactor shaft and a shield for preventing material from being deposited on the cup. The shielding arrangement includes a removable ring shield attached to the cup and a cylindrical shield formed from an electrically non-conductive material surrounding the cup and a portion of the shaft.
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language eng
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subjects BASIC ELECTRIC ELEMENTS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title Cathodic arc disposable sting shielding
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