Projection print engine and method for forming same

Semiconductor print engine structures (304) are formed by growing high quality epitaxial layers (26) of monocrystalline materials overlying monocrystalline substrates (22) such as large silicon wafers by forming a compliant substrate for growing the monocrystalline layers. The compliant substrate in...

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Bibliographische Detailangaben
Hauptverfasser: HOLM PAIGE M, RICHARD FRED V
Format: Patent
Sprache:eng
Schlagworte:
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