Multi-level RF passive device

A passive electrical device includes a first electrical conductor, a second electrical conductor disposed over the first conductor; and a third electrical conductor connecting the first conductor to the second conductor. The said first, second and third conductors are disposed on a semiconductor sub...

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Bibliographische Detailangaben
Hauptverfasser: GROVES ROBERT A, MALINOWSKI JOHN C, STEIN KENNETH J, VOLANT RICHARD P, PETRARCA KEVIN S, SUBBANNA SESHADRI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A passive electrical device includes a first electrical conductor, a second electrical conductor disposed over the first conductor; and a third electrical conductor connecting the first conductor to the second conductor. The said first, second and third conductors are disposed on a semiconductor substrate. The sheet resistivity of the first conductor is approximately equal to the sheet resistivity of the second conductor.