INTERLOCKING CHEMICAL MECHANICAL POLISHING SYSTEM

An interlocking polishing belt apparatus is disclosed. The interlocking polishing belt apparatus includes an interlocking belt, which includes a plurality of studs each having an upper stud end and a lower stud end. In addition, the interlocking polishing belt apparatus includes a polishing belt tha...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	RAMANUJAM K. Y, SRIVATSAN SRIDHARAN, PHAM XUYEN, BOYD JOHN
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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