Wafer level burn-in and electrical test system and method

A burn-in and electrical test system (20) includes a temperature controlled zone (22) and a cool zone (24) separated by a transition zone 25. The temperature controlled zone (22) is configured to receive a plurality of wafer cartridges (26) and connect the cartridges (26) to test electronics (28) an...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HOANG JOHN DINH, RICHMOND DONALD PAUL, LOBACZ JERZY
Format: Patent
Sprache:eng
Schlagworte:
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