Plasma generator

A plasma generator according to the invention includes a rectangular waveguide into which a microwave is introduced, a coaxial tube connected in a T shape to the rectangular waveguide through their respective openings, a vacuum sealing window for blocking the openings with an insulator to thereby va...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	AMADATSU SHIGEKI, TANIGUCHI MICHIO, MINOMO SHOICHIRO, KONDO KAZUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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