Polarized light irradiation apparatus

A polarized light irradiation apparatus, having at least two plane mirrors, is constructed to prevent reduction of the extinction ratio of the polarized light that irradiates a substrate when there is a change of the direction of polarization of the polarized light that is incident on a reflecting m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SHINBORI MASASHI, GOTO MANABU
Format: Patent
Sprache:eng
Schlagworte:
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