Heterogeneously integrated optical modulator and manufacturing method thereof
Disclosed are a heterogeneously integrated optical modulator and a manufacturing method thereof. The modulator includes a substrate having a trench, an input waveguide disposed at one side of the trench, an output waveguide disposed at the other side of the trench, a first Mach-Zehnder interferomete...
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Format: | Patent |
Sprache: | eng |
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