Method and apparatus for controlling a focus point of a stationary beam focusing on a sample in a rotating cartridge placed in a rotating disc

Provided are methods and apparatuses for controlling a position of a target point on a processing result relative to a focus point of a focusing sensor system for determining properties of the processing result. The method includes the steps of determining an initial focus point of the focusing sens...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Borch, Stig Morten, Jahren, Rolf, Stenmark, Sebastian, Tronrud, Ole Christian
Format: Patent
Sprache:eng
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