Microelectronic devices with tiered decks of aligned pillars exhibiting bending and related methods

Microelectronic devices include a lower deck and an upper deck, each comprising a stack structure with a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. First and second arrays of pillars extend through the stack structure of the lower and upper...

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Hauptverfasser: Kewley, David A, Tang, Kok Siak, Carlson, Merri L, Islam, Mohammad Moydul, Zhu, Chao, Yang, Zhigang, Zhang, Xiaosong, Olson, Adam L, Ullah, Md Zakir, Chong, Hui Chin, Tran, Tien Minh Quan
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creator Kewley, David A
Tang, Kok Siak
Carlson, Merri L
Islam, Mohammad Moydul
Zhu, Chao
Yang, Zhigang
Zhang, Xiaosong
Olson, Adam L
Ullah, Md Zakir
Chong, Hui Chin
Tran, Tien Minh Quan
description Microelectronic devices include a lower deck and an upper deck, each comprising a stack structure with a vertically alternating sequence of insulative structures and conductive structures arranged in tiers. First and second arrays of pillars extend through the stack structure of the lower and upper decks, respectively. In one or more of the first and second pillar arrays, at least some pillars exhibit a greater degree of bending away from a vertical orientation than at least some other pillars. The pillars of the first array align with the pillars of the second array along an interface between the lower and upper decks. Related methods are also disclosed.
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title Microelectronic devices with tiered decks of aligned pillars exhibiting bending and related methods
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