Photonic integrated circuit platform and optical phase array device using the same

A photonic integrated circuit platform includes a substrate, a first oxide layer disposed on the substrate and including an insulating transparent oxide, and a first optical element layer disposed on the first oxide layer and including a semiconductor material. The photonic integrated circuit platfo...

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Bibliographische Detailangaben

Hauptverfasser:	Shim, Dongsik, Lee, Changbum, Shin, Dongjae, Jang, Bongyong, Lee, Eunkyung
Format:	Patent
Sprache:	eng
Schlagworte:	OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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