Mapping device and a loadport having the same

A mapping device is adapted for detecting a plurality of test objects disposed in a container, and arranged along a detecting direction. The mapping device includes: a first sensor group defining a first optical axis, and adapted to be disposed at a front side of the container to move in the detecti...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Liu, Jonus
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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