Three-dimensional semiconductor memory devices, methods of manufacturing the same, and electronic systems including the same

Disclosed are three-dimensional semiconductor memory devices, methods of manufacturing the same, and electronic systems including the same. The device includes a peripheral circuit structure on a substrate, and a cell array structure including a stack structure that includes gate electrodes on the p...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Han, Jeehoon, Kohji, Kanamori
Format: Patent
Sprache:eng
Schlagworte:
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