Polycrystalline silicon rod

Provided is a polycrystalline silicon rod suitable as a raw material for production of single-crystalline silicon. A crystal piece (evaluation sample) is collected from a polycrystalline silicon rod grown by a Siemens method, and a polycrystalline silicon rod in which an area ratio of a crystal grai...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Hoshino, Naruhiro, Okada, Tetsuro, Netsu, Shigeyoshi, Ishida, Masahiko
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
Online-Zugang:	Volltext bestellen
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