Etching device and method of manufacturing display device using the same

An etching device includes a chamber; a stage disposed in the chamber and on which a target substrate is loaded; a gas distribution unit disposed to face the stage in the chamber; a plurality of plasma generation modules disposed above the chamber; a gas supply unit that supplies gas into the chambe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lee, Ju Hee, Jo, Soo Beom, Choi, Dae Won, Kim, Sang Gab, Yeo, Yun Jong, Kim, Dae Soo
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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