Semiconductor device structure

A semiconductor device structure includes first nanostructures formed over a substrate. The semiconductor device structure also includes a first gate structure wrapping around the first nanostructures. The semiconductor device structure also includes a first source/drain epitaxial structure formed b...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Cheng, Ming-Lung, Li, Ming-Shuan
Format: Patent
Sprache:eng
Schlagworte:
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