Cover for MEMS-based cooling systems

A heat transfer system includes fluid transfer cells that vibrationally move a fluid and a thermally conductive cover that conducts heat from the cells while avoiding transfer of mechanical energy between the cells. A fluid transfer module includes outer and inner walls, a support member, and a memb...

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Bibliographische Detailangaben
Hauptverfasser: Sathyamurthy, Prabhu, Kapa, Prathima, Gally, Brian James, Mukundan, Vikram, Madhavapeddy, Seshagiri Rao, Ganti, Suryaprakash, Kim, Sangkyu, Halakatti, Shekhar
Format: Patent
Sprache:eng
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