Angular piezoelectric actuator for a MEMS shutter and manufacturing method thereof

A MEMS actuator includes a main body having a central portion, couplable to a substrate, and a peripheral portion suspended over the substrate when the central portion is coupled to the substrate. The peripheral portion has a deformable structure extending around the central portion, and forming suc...

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Bibliographische Detailangaben

Hauptverfasser:	Giusti, Domenico, Merli, Massimiliano
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS
Online-Zugang:	Volltext bestellen
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