Spatially filtered talbot interferometer for wafer distortion measurement

A system for measuring a target grating includes an illumination source, a reference transmission grating, a pupil filter, and a detector. The illumination source is disposed to generate an incident light beam that illuminates the reference transmission grating. The reference transmission grating sp...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Smith, Daniel Gene, Toba, Hidemitsu, Kibayashi, Shunsuke, Otaki, Katsura, Goodwin, Eric Peter, Goldstein, Goldie Lynne
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!