Capacitor structure, semiconductor memory device including the same, method for fabricating the same, and method for fabricating semiconductor memory device including the same

A capacitor structure, a semiconductor memory device including the same, a method for fabricating the same, and a method for fabricating a semiconductor device including the same are provided. The capacitor structure includes a lower electrode, an upper electrode, and a capacitor dielectric film whi...

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Bibliographische Detailangaben

Hauptverfasser:	Baek, Dong Kwan, Shin, Yu Kyung, Kim, Su Hwan, Jung, Kyoo Ho, Kang, Sang Yeol, Choi, Won Sik
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY INFORMATION STORAGE PHYSICS STATIC STORES
Online-Zugang:	Volltext bestellen
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