Capacitor structure, semiconductor memory device including the same, method for fabricating the same, and method for fabricating semiconductor memory device including the same

A capacitor structure, a semiconductor memory device including the same, a method for fabricating the same, and a method for fabricating a semiconductor device including the same are provided. The capacitor structure includes a lower electrode, an upper electrode, and a capacitor dielectric film whi...

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Hauptverfasser: Baek, Dong Kwan, Shin, Yu Kyung, Kim, Su Hwan, Jung, Kyoo Ho, Kang, Sang Yeol, Choi, Won Sik
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creator Baek, Dong Kwan
Shin, Yu Kyung
Kim, Su Hwan
Jung, Kyoo Ho
Kang, Sang Yeol
Choi, Won Sik
description A capacitor structure, a semiconductor memory device including the same, a method for fabricating the same, and a method for fabricating a semiconductor device including the same are provided. The capacitor structure includes a lower electrode, an upper electrode, and a capacitor dielectric film which is interposed between the lower electrode and the upper electrode, wherein the lower electrode includes an electrode film including a first metal element, and a doping oxide film including an oxide of the first metal element between the electrode film and the capacitor dielectric film, and the doping oxide film further includes a second metal element including at least one of Group 5 to Group 11 and Group 15 metal elements, and an impurity element including at least one of silicon (Si), aluminum (Al), zirconium (Zr) and hafnium (Hf).
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subjects ELECTRICITY
INFORMATION STORAGE
PHYSICS
STATIC STORES
title Capacitor structure, semiconductor memory device including the same, method for fabricating the same, and method for fabricating semiconductor memory device including the same
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