Wafer edge ring lifting solution

Apparatuses including a height-adjustable edge ring, and methods for use thereof are described herein. In one example, a process kit for processing a substrate is provided. The process kit has a support ring comprising an upper surface having an inner edge disposed at a first height and an outward e...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Luere, Olivier, Rice, Michael R, Koosau, Denis M, Yousif, Imad, Sarode Vishwanath, Yogananda, Srinivasan, Sunil, Dhindsa, Rajinder, Babayan, Steven E
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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