Non-destructive inspection and manufacturing metrology systems and methods

Measuring or inspecting samples through non-destructive systems and methods. Multiple light pulses emitted from a light source. The light pulses are split into pump pulses and probe pulses. A first probe pulse reaches the surface of a sample after a first time duration after a first pump pulse reach...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Mehendale, Manjusha, Mair, Robin, Alves, Marco
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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