Systems and methods of characterizing semiconductor materials

Systems and methods for non-contact characterization of semiconductor devices. Systems may include: an infrared radiation source directing radiation towards the semiconductor device; a radiation directing device positioned proximal the infrared radiation source to direct radiation towards an opposin...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Ghoddami, Hamidreza, Deans, Gordon, Wong, Johnson Kai Chi
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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