Optical-based validation of parallelism between internal facets

Disclosed herein is a method for validating parallelism of internal facets of a sample. The method includes: (i) providing a sample including a light transmissive substrate and internal facets, nominally parallel and nominally inclined at an angle μnom relative to a flat surface of the sample; (ii)...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Sharlin, Elad, Gelberg, Jonathan, Ronen, Eitan
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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