Structures and methods for use in photolithography

Methods of forming structures including a stress management layer for photolithography and structures including the stress management layer are disclosed. Further disclosed are systems for depositing a stress management layer. Exemplary methods include forming the stress management layer using one o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Piumi, Daniele, de Roest, David Kurt
Format: Patent
Sprache:eng
Schlagworte:
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